Unlocking net-zero in semiconductor manufacturing
Mark Nikolka; Sebastian Göke; Ondrej Burkacky; Peter Spiller; Mark Patel
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- Nature Reviews Electrical Engineering
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1038/s44287-024-00062-5
The original publisher provides the full text and its access options.
Cite this source
Mark Nikolka; Sebastian Göke; Ondrej Burkacky; Peter Spiller; Mark Patel. Unlocking net-zero in semiconductor manufacturing. Nature Reviews Electrical Engineering. 2024-05-29. https://doi.org/10.1038/s44287-024-00062-5