A Deep Learning Approach for Aluminum Corrosion Recognition in Semiconductor Manufacturing
Stefano Binotto; Luca Brunelli; Manuel Barusco; Chiara Masiero; Gian Antonio Susto
- Published
- Publisher
- Elsevier BV
- Journal / collection
- IFAC-PapersOnLine
- Research area
- AI & compute
- Source type
- Journal article
- DOI
- 10.1016/j.ifacol.2025.12.103
The original publisher provides the full text and its access options.
Cite this source
Stefano Binotto; Luca Brunelli; Manuel Barusco; Chiara Masiero; Gian Antonio Susto. A Deep Learning Approach for Aluminum Corrosion Recognition in Semiconductor Manufacturing. IFAC-PapersOnLine. 2025. https://doi.org/10.1016/j.ifacol.2025.12.103