Design of control system for automated semiconductor etching equipment
Jun Qian
- Published
- Publisher
- SPIE
- Journal / collection
- International Conference on Physics, Photonics, and Optical Engineering (ICPPOE 2024)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1117/12.3060396
The original publisher provides the full text and its access options.
Cite this source
Jun Qian. Design of control system for automated semiconductor etching equipment. International Conference on Physics, Photonics, and Optical Engineering (ICPPOE 2024). 2025-03-07. https://doi.org/10.1117/12.3060396