INVESTIGATION OF SEMICONDUCTOR HETEROSTRUCTURES WITH NANOSCALE LAYERS USING DYNAMIC SECONDARY ION MASS SPECTROMETRY
Ioffe Institute; M.V. Tokarev; B.Ya. Ber; Ioffe Institute; D.Yu. Kazantsev; Ioffe Institute; V.V. Mamutin; Ioffe Institute
- Published
- Publisher
- Ulyanovsk State Technical University
- Journal / collection
- Materials of the 27th All-Russian Youth Scientific Conference
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.61527/appfe-2024.282-284
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Cite this source
Ioffe Institute; M.V. Tokarev; B.Ya. Ber; Ioffe Institute; D.Yu. Kazantsev; Ioffe Institute; V.V. Mamutin; Ioffe Institute. INVESTIGATION OF SEMICONDUCTOR HETEROSTRUCTURES WITH NANOSCALE LAYERS USING DYNAMIC SECONDARY ION MASS SPECTROMETRY. Materials of the 27th All-Russian Youth Scientific Conference. 2024-10-21. https://doi.org/10.61527/appfe-2024.282-284