Data-driven monitoring of powder build-up for condition-based maintenance in semiconductor manufacturing facility
Chanyoung Kim; Hye Eun Sim; Sang Jeen Hong
- Published
- Publisher
- Emerald
- Journal / collection
- Journal of Quality in Maintenance Engineering
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1108/jqme-09-2023-0083
The original publisher provides the full text and its access options.
Cite this source
Chanyoung Kim; Hye Eun Sim; Sang Jeen Hong. Data-driven monitoring of powder build-up for condition-based maintenance in semiconductor manufacturing facility. Journal of Quality in Maintenance Engineering. 2024-12-10. https://doi.org/10.1108/jqme-09-2023-0083