Characteristics of inorganic acid emission from various generation semiconductor manufacturing factories
Ming-Peng Yeh; Lian-Fang Wu; En-Tsu Fan; Tony Chen; Tzu-Sou Chuang; Sher Ling Lee; Kuo-Lun Tung
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Chemosphere
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.chemosphere.2023.140745
The original publisher provides the full text and its access options.
Cite this source
Ming-Peng Yeh; Lian-Fang Wu; En-Tsu Fan; Tony Chen; Tzu-Sou Chuang; Sher Ling Lee; Kuo-Lun Tung. Characteristics of inorganic acid emission from various generation semiconductor manufacturing factories. Chemosphere. 2024-01. https://doi.org/10.1016/j.chemosphere.2023.140745