Fault Diagnosis of Semiconductor Handlers using Multiple Autoencoders
Won-Sup Lee; Yeon-June Kang
- Published
- Publisher
- The Korean Society for Noise and Vibration Engineering
- Journal / collection
- Transactions of the Korean Society for Noise and Vibration Engineering
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.5050/ksnve.2024.34.4.393
The original publisher provides the full text and its access options.
Cite this source
Won-Sup Lee; Yeon-June Kang. Fault Diagnosis of Semiconductor Handlers using Multiple Autoencoders. Transactions of the Korean Society for Noise and Vibration Engineering. 2024-08-20. https://doi.org/10.5050/ksnve.2024.34.4.393