(Invited) Control of Elementary Processes in Semiconductor Process Plasmas
Masaharu Shiratani; Kunihiro Kamataki; Naho Itagaki; Naoto Yamashita; Takamasa Okumura; Kazunori Koga
- Published
- Publisher
- The Electrochemical Society
- Journal / collection
- ECS Meeting Abstracts
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1149/ma2024-02201780mtgabs
The original publisher provides the full text and its access options.
Cite this source
Masaharu Shiratani; Kunihiro Kamataki; Naho Itagaki; Naoto Yamashita; Takamasa Okumura; Kazunori Koga. (Invited) Control of Elementary Processes in Semiconductor Process Plasmas. ECS Meeting Abstracts. 2024-11-22. https://doi.org/10.1149/ma2024-02201780mtgabs