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Research literature / Conference paper

Productivity Enhancement in Semiconductor Manufacturing with Ai-Enabled Operations Digital Twin Platform

Amin Arbabian; Aria Pezeshk; Kaipei Yang

Published
Publisher
IEEE
Journal / collection
2024 19th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/impact63555.2024.10818929

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Amin Arbabian; Aria Pezeshk; Kaipei Yang. Productivity Enhancement in Semiconductor Manufacturing with Ai-Enabled Operations Digital Twin Platform. 2024 19th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT). 2024-10-22. https://doi.org/10.1109/impact63555.2024.10818929

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