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Research literature / Conference paper

A paradigm shift in next-generation semiconductor leadership: design-manufacturing co-optimization (DMCO)

Koki Tsurusaki; Masaharu Kobayashi; Mahoro Yoshida; Akio Koyama

Published
Publisher
SPIE
Journal / collection
DTCO and Computational Patterning III
Research area
Semiconductors
Source type
Conference paper
DOI
10.1117/12.3018033

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Koki Tsurusaki; Masaharu Kobayashi; Mahoro Yoshida; Akio Koyama. A paradigm shift in next-generation semiconductor leadership: design-manufacturing co-optimization (DMCO). DTCO and Computational Patterning III. 2024-04-10. https://doi.org/10.1117/12.3018033

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