Quantum Diamond Microscopy for Semiconductor Failure Analysis
Marwa Garsi; Andreas Welscher; Manuel Schrimpf; Bartu Bisgin; Michael Hanke; Horst Gieser; Daniela Zahn; Fleming Bruckmaier
- Published
- Publisher
- ASM International
- Journal / collection
- EDFA Technical Articles
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.31399/asm.edfa.2025-1.p018
The original publisher provides the full text and its access options.
Cite this source
Marwa Garsi; Andreas Welscher; Manuel Schrimpf; Bartu Bisgin; Michael Hanke; Horst Gieser; Daniela Zahn; Fleming Bruckmaier. Quantum Diamond Microscopy for Semiconductor Failure Analysis. EDFA Technical Articles. 2025-02-01. https://doi.org/10.31399/asm.edfa.2025-1.p018