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Research literature / Preprint / posted paper

Mass Flow Control Using Estimated Output Feedback in Semiconductor Processes

Kotaro Takijiri; Kazuki Nakata; Daisuke Hayashi

Published
Publisher
Elsevier BV
Research area
Semiconductors
Source type
Preprint / posted paper
DOI
10.2139/ssrn.4935882

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Kotaro Takijiri; Kazuki Nakata; Daisuke Hayashi. Mass Flow Control Using Estimated Output Feedback in Semiconductor Processes. Elsevier BV. 2024. https://doi.org/10.2139/ssrn.4935882

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