Predictive Maintenance in Semiconductor Manufacturing: Leveraging IoT Sensor Data for Equipment Reliability
Austin, TX; Tarun Parmar
- Published
- Publisher
- Edtech Publishers (OPC) Private Limited
- Journal / collection
- INTERANTIONAL JOURNAL OF SCIENTIFIC RESEARCH IN ENGINEERING AND MANAGEMENT
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.55041/ijsrem7616
The original publisher provides the full text and its access options.
Cite this source
Austin, TX; Tarun Parmar. Predictive Maintenance in Semiconductor Manufacturing: Leveraging IoT Sensor Data for Equipment Reliability. INTERANTIONAL JOURNAL OF SCIENTIFIC RESEARCH IN ENGINEERING AND MANAGEMENT. 2025-01-13. https://doi.org/10.55041/ijsrem7616