Analysis and Requirements Definition of End Effector Design for a Semiconductor Wafer Handling
Georgi D. Todorov; Konstantin H. Kamberov; Yavor P. Sofronov
- Published
- Publisher
- IEEE
- Journal / collection
- 2024 59th International Scientific Conference on Information, Communication and Energy Systems and Technologies (ICEST)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/icest62335.2024.10639692
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Cite this source
Georgi D. Todorov; Konstantin H. Kamberov; Yavor P. Sofronov. Analysis and Requirements Definition of End Effector Design for a Semiconductor Wafer Handling. 2024 59th International Scientific Conference on Information, Communication and Energy Systems and Technologies (ICEST). 2024-07-01. https://doi.org/10.1109/icest62335.2024.10639692