Real-to-sim: automatic simulation model generation for a digital twin in semiconductor manufacturing
Sebastian Behrendt; Thomas Altenmüller; Marvin Carl May; Andreas Kuhnle; Gisela Lanza
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- Journal of Intelligent Manufacturing
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1007/s10845-025-02572-x
The original publisher provides the full text and its access options.
Cite this source
Sebastian Behrendt; Thomas Altenmüller; Marvin Carl May; Andreas Kuhnle; Gisela Lanza. Real-to-sim: automatic simulation model generation for a digital twin in semiconductor manufacturing. Journal of Intelligent Manufacturing. 2025-01-29. https://doi.org/10.1007/s10845-025-02572-x