Semiconductor Equipment Failure Detection using Correlation Analysis and Data Augmentation
Minjae Baek; Seoung Bum Kim
- Published
- Publisher
- Korean Institute of Industrial Engineers
- Journal / collection
- Journal of the Korean Institute of Industrial Engineers
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.7232/jkiie.2024.50.3.189
The original publisher provides the full text and its access options.
Cite this source
Minjae Baek; Seoung Bum Kim. Semiconductor Equipment Failure Detection using Correlation Analysis and Data Augmentation. Journal of the Korean Institute of Industrial Engineers. 2024-06-15. https://doi.org/10.7232/jkiie.2024.50.3.189