Gas Box Exhaust Design Modification for Accidental Hazardous Gas Releases in Semiconductor Industry
Keun-Young Lim; Seungho Jung; Sang-Ryung Kim
- Published
- Publisher
- MDPI AG
- Journal / collection
- Processes
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.3390/pr12112531
The original publisher provides the full text and its access options.
Cite this source
Keun-Young Lim; Seungho Jung; Sang-Ryung Kim. Gas Box Exhaust Design Modification for Accidental Hazardous Gas Releases in Semiconductor Industry. Processes. 2024-11-13. https://doi.org/10.3390/pr12112531