Application of Kelvin Probe Force Microscopy Techniques for Semiconductor Device Failure Analysis
Yoichi Miyahara
- Published
- Publisher
- ASM International
- Journal / collection
- International Symposium for Testing and Failure Analysis
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.31399/asm.cp.istfa2026tp00s1
The original publisher provides the full text and its access options.
Cite this source
Yoichi Miyahara. Application of Kelvin Probe Force Microscopy Techniques for Semiconductor Device Failure Analysis. International Symposium for Testing and Failure Analysis. 2026-10-04. https://doi.org/10.31399/asm.cp.istfa2026tp00s1