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Research literature / Conference paper

Sustainability Model for Semiconductor Manufacturing

Eason Qi; Tienying Luo; Mallory Wick; Helen Armer; Michael Raiford; Tony Marteniz; Sanjiv Mittal

Published
Publisher
IEEE
Journal / collection
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/asmc61125.2024.10545500

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Eason Qi; Tienying Luo; Mallory Wick; Helen Armer; Michael Raiford; Tony Marteniz; Sanjiv Mittal. Sustainability Model for Semiconductor Manufacturing. 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC). 2024-05-13. https://doi.org/10.1109/asmc61125.2024.10545500

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