Optimizing HVAC systems for semiconductor fabrication: A data-intensive framework for energy efficiency and sustainability
Hsiao-Ping Ni; Wai Oswald Chong; Jui-Sheng Chou
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Journal of Building Engineering
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.jobe.2024.109397
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Cite this source
Hsiao-Ping Ni; Wai Oswald Chong; Jui-Sheng Chou. Optimizing HVAC systems for semiconductor fabrication: A data-intensive framework for energy efficiency and sustainability. Journal of Building Engineering. 2024-07. https://doi.org/10.1016/j.jobe.2024.109397