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Research literature / Conference paper

Flattening the Silicon Nitride Surface of Semiconductor Chips Through Etching Processes

Donghan Wang; Zhongwei Jiang; Jing Wang; Yingming Ma

Published
Publisher
IEEE
Journal / collection
2024 Conference of Science and Technology for Integrated Circuits (CSTIC)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/cstic61820.2024.10532073

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Donghan Wang; Zhongwei Jiang; Jing Wang; Yingming Ma. Flattening the Silicon Nitride Surface of Semiconductor Chips Through Etching Processes. 2024 Conference of Science and Technology for Integrated Circuits (CSTIC). 2024-03-17. https://doi.org/10.1109/cstic61820.2024.10532073

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