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Research literature / Conference paper

BEOL-Compatible Photosensors by Atomic-Layer-Deposited ZnO Semiconductor Transistors and Their Monolithic 3D Integration

Yuyan Fan; Ziheng Wang; Yulong Dong; Zhiyu Lin; Danyang Chen; Shiyi Zhang; Jingquan Liu; Mengwei Si; Xiuyan Li

Published
Publisher
IEEE
Journal / collection
2025 9th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/edtm61175.2025.11041538

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Yuyan Fan; Ziheng Wang; Yulong Dong; Zhiyu Lin; Danyang Chen; Shiyi Zhang; Jingquan Liu; Mengwei Si; Xiuyan Li. BEOL-Compatible Photosensors by Atomic-Layer-Deposited ZnO Semiconductor Transistors and Their Monolithic 3D Integration. 2025 9th IEEE Electron Devices Technology & Manufacturing Conference (EDTM). 2025-03-09. https://doi.org/10.1109/edtm61175.2025.11041538

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