Shallow p-n Junctions Under Discrete Impurities in Semiconductor Devices
Nobuyuki Sano
- Published
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Journal / collection
- IEEE Transactions on Electron Devices
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1109/ted.2023.3341839
The original publisher provides the full text and its access options.
Cite this source
Nobuyuki Sano. Shallow p-n Junctions Under Discrete Impurities in Semiconductor Devices. IEEE Transactions on Electron Devices. 2024-02. https://doi.org/10.1109/ted.2023.3341839