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Research literature / Preprint / posted paper

Transformer-Based and Generative AI Framework for Automated Defect Detection in Semiconductor Wafer Inspection

Balachandar Jeganathan

Published
Publisher
Elsevier BV
Research area
Semiconductors
Source type
Preprint / posted paper
DOI
10.2139/ssrn.5774423

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Balachandar Jeganathan. Transformer-Based and Generative AI Framework for Automated Defect Detection in Semiconductor Wafer Inspection. Elsevier BV. 2025. https://doi.org/10.2139/ssrn.5774423

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