Ultrashort vertical-channel MoS2 transistor using a self-aligned contact
Liting Liu; Yang Chen; Long Chen; Biao Xie; Guoli Li; Lingan Kong; Quanyang Tao; Zhiwei Li; Xiaokun Yang; Zheyi Lu; Likuan Ma; Donglin Lu; Xiangdong Yang; Yuan Liu
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- Nature Communications
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1038/s41467-023-44519-x
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Cite this source
Liting Liu; Yang Chen; Long Chen; Biao Xie; Guoli Li; Lingan Kong; Quanyang Tao; Zhiwei Li; Xiaokun Yang; Zheyi Lu; Likuan Ma; Donglin Lu; Xiangdong Yang; Yuan Liu. Ultrashort vertical-channel MoS2 transistor using a self-aligned contact. Nature Communications. 2024-01-02. https://doi.org/10.1038/s41467-023-44519-x