Auto-Labeling for Pattern Recognition of Wafer Defect Maps in Semiconductor Manufacturing
Shu-Kai S. Fan; Pei-Chen Chen; Chih-Hung Jen; Kanchana Sethanan
- Published
- Publisher
- ASME International
- Journal / collection
- Journal of Manufacturing Science and Engineering
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1115/1.4065118
The original publisher provides the full text and its access options.
Cite this source
Shu-Kai S. Fan; Pei-Chen Chen; Chih-Hung Jen; Kanchana Sethanan. Auto-Labeling for Pattern Recognition of Wafer Defect Maps in Semiconductor Manufacturing. Journal of Manufacturing Science and Engineering. 2024-04-22. https://doi.org/10.1115/1.4065118