Physics-Informed Machine Learning for Accurate and Physically Valid Prediction of Semiconductor Defect Levels
Ashutosh Tiwari; Widodo Widodo; Dyah Ika Krisnawati; Tsung-Rong Kuo
- Published
- Publisher
- Elsevier BV
- Research area
- AI & compute
- Source type
- Preprint / posted paper
- DOI
- 10.2139/ssrn.5293548
This is a preprint or other posted paper. Check the original source for its review and publication status.
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Cite this source
Ashutosh Tiwari; Widodo Widodo; Dyah Ika Krisnawati; Tsung-Rong Kuo. Physics-Informed Machine Learning for Accurate and Physically Valid Prediction of Semiconductor Defect Levels. Elsevier BV. 2025. https://doi.org/10.2139/ssrn.5293548