Performance Improvement of a-In-Ga-Sn-O Thin-Film Transistor with Oxygen Doping by Reactive Sputtering Method
Tsung-I Liao; Sheng-Po Chang; Wen-Xiang Shi; Shoou-Jinn Chang; Jone-Fang Chen
- Published
- Publisher
- Springer Science and Business Media LLC
- Journal / collection
- Journal of Electronic Materials
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1007/s11664-024-11035-7
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Cite this source
Tsung-I Liao; Sheng-Po Chang; Wen-Xiang Shi; Shoou-Jinn Chang; Jone-Fang Chen. Performance Improvement of a-In-Ga-Sn-O Thin-Film Transistor with Oxygen Doping by Reactive Sputtering Method. Journal of Electronic Materials. 2024-04-11. https://doi.org/10.1007/s11664-024-11035-7