Using thin-film transistor with thick oxygen-doped Si–Zn–Sn–O channel and patterned Pt/NiO capping layer to enhance ultraviolet light sensing performance
Rong-Ming Ko; Shui-Jinn Wang; Yu-Hao Chen; Chang-Yu Liao; Chien-Hung Wu
- Published
- Publisher
- IOP Publishing
- Journal / collection
- Japanese Journal of Applied Physics
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.35848/1347-4065/ad0cdc
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Cite this source
Rong-Ming Ko; Shui-Jinn Wang; Yu-Hao Chen; Chang-Yu Liao; Chien-Hung Wu. Using thin-film transistor with thick oxygen-doped Si–Zn–Sn–O channel and patterned Pt/NiO capping layer to enhance ultraviolet light sensing performance. Japanese Journal of Applied Physics. 2024-01-04. https://doi.org/10.35848/1347-4065/ad0cdc