Data-driven scheduling for the photolithography process in semiconductor manufacturing
Cheng-Ting Huang; Tsung-Jung Hsieh; Bertrand M.T. Lin
- Published
- Publisher
- American Institute of Mathematical Sciences (AIMS)
- Journal / collection
- Journal of Industrial and Management Optimization
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.3934/jimo.2024157
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Cite this source
Cheng-Ting Huang; Tsung-Jung Hsieh; Bertrand M.T. Lin. Data-driven scheduling for the photolithography process in semiconductor manufacturing. Journal of Industrial and Management Optimization. 2025. https://doi.org/10.3934/jimo.2024157