Assessment of the crystalline orientation of nanoscale semiconductor structures via atom probe tomography
J. Cañas; A. Grenier; J. L. Rouviere; A. Harikumar; S. Ndiaye; A. Jannaud; E. Monroy; L. Rigutti
- Published
- Publisher
- AIP Publishing
- Journal / collection
- Applied Physics Letters
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1063/5.0242659
The original publisher provides the full text and its access options.
Cite this source
J. Cañas; A. Grenier; J. L. Rouviere; A. Harikumar; S. Ndiaye; A. Jannaud; E. Monroy; L. Rigutti. Assessment of the crystalline orientation of nanoscale semiconductor structures via atom probe tomography. Applied Physics Letters. 2025-03-01. https://doi.org/10.1063/5.0242659