Polishing of Optotechnical Parts Made of Semiconductor Materials
Yu. D. Filatov; A. Y. Boyarintsev; O. V. Kolesnikov; S. M. Galkin; V. O. Novgorodtsev; Ya. I. Polupan; O. I. Pylypenko; V. I. Sidorko; S. V. Kovalev
- Published
- Publisher
- Allerton Press
- Journal / collection
- Journal of Superhard Materials
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.3103/s1063457625020029
The original publisher provides the full text and its access options.
Cite this source
Yu. D. Filatov; A. Y. Boyarintsev; O. V. Kolesnikov; S. M. Galkin; V. O. Novgorodtsev; Ya. I. Polupan; O. I. Pylypenko; V. I. Sidorko; S. V. Kovalev. Polishing of Optotechnical Parts Made of Semiconductor Materials. Journal of Superhard Materials. 2025-04. https://doi.org/10.3103/s1063457625020029