Digital Twin Based Uncertainty Informed Time Constraint Control in Semiconductor Manufacturing
Marvin Carl May; Lars Kiefer; Gisela Lanza
- Published
- Publisher
- IEEE
- Journal / collection
- 2024 Winter Simulation Conference (WSC)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/wsc63780.2024.10838845
The original publisher provides the full text and its access options.
Cite this source
Marvin Carl May; Lars Kiefer; Gisela Lanza. Digital Twin Based Uncertainty Informed Time Constraint Control in Semiconductor Manufacturing. 2024 Winter Simulation Conference (WSC). 2024-12-15. https://doi.org/10.1109/wsc63780.2024.10838845