Two-axis robot positioning errors model of a semiconductor inspection machine
S.-Y. Fan; T.-C. Chan; B. Roy
- Published
- Publisher
- Institution of Engineering and Technology (IET)
- Journal / collection
- IET Conference Proceedings
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1049/icp.2023.3329
The original publisher provides the full text and its access options.
Cite this source
S.-Y. Fan; T.-C. Chan; B. Roy. Two-axis robot positioning errors model of a semiconductor inspection machine. IET Conference Proceedings. 2024-01-16. https://doi.org/10.1049/icp.2023.3329