Rapid MOSFET threshold voltage testing for high throughput semiconductor process monitoring
Michael H. Herman; Trenton T. Nguyen; Ken Wong; Jeff Johnson; Ben Morris
- Published
- Publisher
- IEEE
- Journal / collection
- 2024 IEEE 36th International Conference on Microelectronic Test Structures (ICMTS)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/icmts59902.2024.10520252
The original publisher provides the full text and its access options.
Cite this source
Michael H. Herman; Trenton T. Nguyen; Ken Wong; Jeff Johnson; Ben Morris. Rapid MOSFET threshold voltage testing for high throughput semiconductor process monitoring. 2024 IEEE 36th International Conference on Microelectronic Test Structures (ICMTS). 2024-04-15. https://doi.org/10.1109/icmts59902.2024.10520252