Lithography innovations for the artificial intelligence era
Alberto Pirati; Jeannot Driedonkx; Wim P. de Boeij; Elliott Mc Namara; Jeroen de Groot; Jorgen Kool; Peter ten Berge; Michael Kubis; Daan M. Slotboom; Gianluca Gattobigio; Aditya Deshpande; Jean Philippe van Damme; Antoine Kempen; Ahmed Zayed; Mohamed El Kodadi; Stefan C. J. A. Keij; Arjan Gijsbertsen; Yzzer Roman Gutierrez; Saurabh Singh
- Published
- Publisher
- SPIE
- Journal / collection
- Optical and EUV Nanolithography XXXVIII
- Research area
- AI & compute
- Source type
- Conference paper
- DOI
- 10.1117/12.3050947
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Cite this source
Alberto Pirati; Jeannot Driedonkx; Wim P. de Boeij; Elliott Mc Namara; Jeroen de Groot; Jorgen Kool; Peter ten Berge; Michael Kubis; Daan M. Slotboom; Gianluca Gattobigio; Aditya Deshpande; Jean Philippe van Damme; Antoine Kempen; Ahmed Zayed; Mohamed El Kodadi; Stefan C. J. A. Keij; Arjan Gijsbertsen; Yzzer Roman Gutierrez; Saurabh Singh. Lithography innovations for the artificial intelligence era. Optical and EUV Nanolithography XXXVIII. 2025-04-22. https://doi.org/10.1117/12.3050947