Skip to content
Independent research & intelligence
OPEN VARIABLE

Evidence-First Signal Intelligence

Menu

Research literature / Conference paper

Correlative In-Situ AFM-in-SEM Technique for Advanced Semiconductor Failure Analysis and Material Characterization (2026 Update)

Jan Neuman; Radek Dao; Ondřej Novotný; Rosalinda Ring; Jamie Gravell; Libor Strakoš; Adam Stokes; Umberto Celano; Ashiqur Rahman Laskar; Willy Lim; Guillaume Boetsch

Published
Publisher
ASM International
Journal / collection
International Symposium for Testing and Failure Analysis
Research area
Semiconductors
Source type
Conference paper
DOI
10.31399/asm.cp.istfa2026tp00n1

Read the original source ↗

The original publisher provides the full text and its access options.

Cite this source

Jan Neuman; Radek Dao; Ondřej Novotný; Rosalinda Ring; Jamie Gravell; Libor Strakoš; Adam Stokes; Umberto Celano; Ashiqur Rahman Laskar; Willy Lim; Guillaume Boetsch. Correlative In-Situ AFM-in-SEM Technique for Advanced Semiconductor Failure Analysis and Material Characterization (2026 Update). International Symposium for Testing and Failure Analysis. 2026-10-04. https://doi.org/10.31399/asm.cp.istfa2026tp00n1

Download RIS