Machine learning-based dispatching for a wet clean station in semiconductor manufacturing
Jun-Hee Han; Sung-hoon Jeong; Gyusun Hwang; Ju-Yong Lee
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Journal of Manufacturing Systems
- Research area
- AI & compute
- Source type
- Journal article
- DOI
- 10.1016/j.jmsy.2024.09.018
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Cite this source
Jun-Hee Han; Sung-hoon Jeong; Gyusun Hwang; Ju-Yong Lee. Machine learning-based dispatching for a wet clean station in semiconductor manufacturing. Journal of Manufacturing Systems. 2024-12. https://doi.org/10.1016/j.jmsy.2024.09.018