A New Back‐End‐Of‐Line Ferroelectric Field‐Effect Transistor Platform via Laser Processing
Sang Woo Kim; Wonjun Shin; Ryun‐Han Koo; Jangsaeng Kim; Jiseong Im; Dooyong Koh; Jong‐Ho Lee; Suraj S Cheema; Daewoong Kwon
- Published
- Publisher
- Wiley
- Journal / collection
- Small
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1002/smll.202406376
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Cite this source
Sang Woo Kim; Wonjun Shin; Ryun‐Han Koo; Jangsaeng Kim; Jiseong Im; Dooyong Koh; Jong‐Ho Lee; Suraj S Cheema; Daewoong Kwon. A New Back‐End‐Of‐Line Ferroelectric Field‐Effect Transistor Platform via Laser Processing. Small. 2024-11-06. https://doi.org/10.1002/smll.202406376