Anomaly Detection in Semiconductor Processing using Convolutional Neural Network with Bidirectional Long Short-Term Memory
J. Velumani; Saif Obbayed; Veeranna Kotagi; P. Sathish; P. Vivek Karthick
- Published
- Publisher
- IEEE
- Journal / collection
- 2025 3rd International Conference on Data Science and Information System (ICDSIS)
- Research area
- AI & compute
- Source type
- Conference paper
- DOI
- 10.1109/icdsis65355.2025.11071162
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Cite this source
J. Velumani; Saif Obbayed; Veeranna Kotagi; P. Sathish; P. Vivek Karthick. Anomaly Detection in Semiconductor Processing using Convolutional Neural Network with Bidirectional Long Short-Term Memory. 2025 3rd International Conference on Data Science and Information System (ICDSIS). 2025-05-16. https://doi.org/10.1109/icdsis65355.2025.11071162