Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach
Bingran Wang; Min Sung Kim; Taewoong Yoon; Dasom Lee; Byeong-Sang Kim; Dougyong Sung; John T. Hwang
- Published
- Publisher
- Springer Science and Business Media LLC
- Research area
- Semiconductors
- Source type
- Preprint / posted paper
- DOI
- 10.21203/rs.3.rs-5365259/v1
This is a preprint or other posted paper. Check the original source for its review and publication status.
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Cite this source
Bingran Wang; Min Sung Kim; Taewoong Yoon; Dasom Lee; Byeong-Sang Kim; Dougyong Sung; John T. Hwang. Design optimization of semiconductor manufacturing equipment using a novel multi-fidelity surrogate modeling approach. Springer Science and Business Media LLC. 2024-11-19. https://doi.org/10.21203/rs.3.rs-5365259/v1