Generative AI for Improved Defect Detection in Semiconductor Wafers
Thien Huynh; Duy Truong; Tharindu Bandaragoda
- Published
- Publisher
- IEEE
- Journal / collection
- IECON 2024 - 50th Annual Conference of the IEEE Industrial Electronics Society
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/iecon55916.2024.10905182
The original publisher provides the full text and its access options.
Cite this source
Thien Huynh; Duy Truong; Tharindu Bandaragoda. Generative AI for Improved Defect Detection in Semiconductor Wafers. IECON 2024 - 50th Annual Conference of the IEEE Industrial Electronics Society. 2024-11-03. https://doi.org/10.1109/iecon55916.2024.10905182