Physics-Informed Multi-Task Learning for Material Removal Rate Prediction in Semiconductor Chemical Mechanical Planarization
Md Wahidur Rahman; Gregory W. Vogl; Xiaodong Jia; Yongzhi Qu
- Published
- Publisher
- IEEE
- Journal / collection
- 2024 IEEE International Conference on Prognostics and Health Management (ICPHM)
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.1109/icphm61352.2024.10627679
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Cite this source
Md Wahidur Rahman; Gregory W. Vogl; Xiaodong Jia; Yongzhi Qu. Physics-Informed Multi-Task Learning for Material Removal Rate Prediction in Semiconductor Chemical Mechanical Planarization. 2024 IEEE International Conference on Prognostics and Health Management (ICPHM). 2024-06-17. https://doi.org/10.1109/icphm61352.2024.10627679