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Research literature / Conference paper

TeO 2 as Amorphous P-Type Transistor for Back-End-of-Line Applications

John Robertson; Xuewei Zhang; Qingzhong Gui; Yuzheng Guo

Published
Publisher
IEEE
Journal / collection
2024 IEEE 17th International Conference on Solid-State & Integrated Circuit Technology (ICSICT)
Research area
Semiconductors
Source type
Conference paper
DOI
10.1109/icsict62049.2024.10831567

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John Robertson; Xuewei Zhang; Qingzhong Gui; Yuzheng Guo. TeO 2 as Amorphous P-Type Transistor for Back-End-of-Line Applications. 2024 IEEE 17th International Conference on Solid-State & Integrated Circuit Technology (ICSICT). 2024-10-22. https://doi.org/10.1109/icsict62049.2024.10831567

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