OrbiSIMS depth profiling of semiconductor materials—Useful yield and depth resolution
Yundong Zhou; Alexis Franquet; Valentina Spampinato; Alex Merkulov; Michael R. Keenan; Paul A. W. van der Heide; Gustavo F. Trindade; Wilfried Vandervorst; Ian S. Gilmore
- Published
- Publisher
- American Vacuum Society
- Journal / collection
- Journal of Vacuum Science & Technology A
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1116/6.0003821
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Cite this source
Yundong Zhou; Alexis Franquet; Valentina Spampinato; Alex Merkulov; Michael R. Keenan; Paul A. W. van der Heide; Gustavo F. Trindade; Wilfried Vandervorst; Ian S. Gilmore. OrbiSIMS depth profiling of semiconductor materials—Useful yield and depth resolution. Journal of Vacuum Science & Technology A. 2024-09-01. https://doi.org/10.1116/6.0003821