Manufacturing Process and Comparative Analysis of MEMS Accelerometers
Shilong Zhang; Zhengyang Tang; Kejun Chen
- Published
- Publisher
- IEEE
- Journal / collection
- 2024 IEEE 7th International Conference on Electronic Information and Communication Technology (ICEICT)
- Research area
- Industrial systems
- Source type
- Conference paper
- DOI
- 10.1109/iceict61637.2024.10671126
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Cite this source
Shilong Zhang; Zhengyang Tang; Kejun Chen. Manufacturing Process and Comparative Analysis of MEMS Accelerometers. 2024 IEEE 7th International Conference on Electronic Information and Communication Technology (ICEICT). 2024-07-31. https://doi.org/10.1109/iceict61637.2024.10671126