An Introduction to the Focused Ion Beam as a Microchip Circuit Edit Tool (2026 Update)
Steven Herschbein; Shida Tan; Nicholas Antoniou; Richard Livengood; Michael Wong
- Published
- Publisher
- ASM International
- Journal / collection
- International Symposium for Testing and Failure Analysis
- Research area
- Semiconductors
- Source type
- Conference paper
- DOI
- 10.31399/asm.cp.istfa2026tp00a2
The original publisher provides the full text and its access options.
Cite this source
Steven Herschbein; Shida Tan; Nicholas Antoniou; Richard Livengood; Michael Wong. An Introduction to the Focused Ion Beam as a Microchip Circuit Edit Tool (2026 Update). International Symposium for Testing and Failure Analysis. 2026-10-04. https://doi.org/10.31399/asm.cp.istfa2026tp00a2