Scale effects in BEOL compatible ferroelectric field-effect transistor memories with random phase fluctuation
Yu-Xi Yang; Qiang Li; Jia-Cheng Li; Tian-Tong Cheng; Zhi-Wei Zheng
- Published
- Publisher
- IOP Publishing
- Journal / collection
- Physica Scripta
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1088/1402-4896/adab2f
The original publisher provides the full text and its access options.
Cite this source
Yu-Xi Yang; Qiang Li; Jia-Cheng Li; Tian-Tong Cheng; Zhi-Wei Zheng. Scale effects in BEOL compatible ferroelectric field-effect transistor memories with random phase fluctuation. Physica Scripta. 2025-01-28. https://doi.org/10.1088/1402-4896/adab2f