A fast ramp-up framework for wafer yield improvement in semiconductor manufacturing systems
Hong-Wei Xu; Qi-Hua Zhang; Yan-Ning Sun; Qun-Long Chen; Wei Qin; You-Long Lv; Jie Zhang
- Published
- Publisher
- Elsevier BV
- Journal / collection
- Journal of Manufacturing Systems
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1016/j.jmsy.2024.07.001
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Cite this source
Hong-Wei Xu; Qi-Hua Zhang; Yan-Ning Sun; Qun-Long Chen; Wei Qin; You-Long Lv; Jie Zhang. A fast ramp-up framework for wafer yield improvement in semiconductor manufacturing systems. Journal of Manufacturing Systems. 2024-10. https://doi.org/10.1016/j.jmsy.2024.07.001