Threshold voltage mapping at the nanoscale of GaN-based high electron mobility transistor structures using hyperspectral scanning capacitance microscopy
Chen Chen; Saptarsi Ghosh; Peter De Wolf; Zhida Liang; Francesca Adams; Menno J. Kappers; David J. Wallis; Rachel A. Oliver
- Published
- Publisher
- AIP Publishing
- Journal / collection
- Applied Physics Letters
- Research area
- Semiconductors
- Source type
- Journal article
- DOI
- 10.1063/5.0203646
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Cite this source
Chen Chen; Saptarsi Ghosh; Peter De Wolf; Zhida Liang; Francesca Adams; Menno J. Kappers; David J. Wallis; Rachel A. Oliver. Threshold voltage mapping at the nanoscale of GaN-based high electron mobility transistor structures using hyperspectral scanning capacitance microscopy. Applied Physics Letters. 2024-06-03. https://doi.org/10.1063/5.0203646